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Plasma preconditioning of sapphire substrate for GaN epitaxy

Heinlein, C. / Grepstad, J. / Riechert, H. / Averbeck, R.

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Plasma preconditioning of sapphire substrate for GaN epitaxy

Heinlein, C. / Grepstad, J. / Riechert, H. / Averbeck, R.

Plasma preconditioning of sapphire substrate for GaN epitaxy

Heinlein, C. / Grepstad, J. / Riechert, H. / Averbeck, R.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Plasma preconditioning of sapphire substrate for GaN epitaxy

Contributors:

Heinlein, C. (author) / Grepstad, J. (author) / Riechert, H. (author) / Averbeck, R. (author) / Aulombard, R. L. / Cavenett, B. C. / Gil, B. / Triboulet, R.

Published in:

Solid-State Materials for Advanced Technology ; 253-257

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 43

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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