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Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Won, J. (Autor:in) / Yagi, H. (Autor:in) / Hatta, A. (Autor:in) / Jiang, N. (Autor:in) / Ito, T. (Autor:in) / Sasaki, T. (Autor:in) / Hiraki, A. (Autor:in)
APPLIED SURFACE SCIENCE ; 113/114 ; 249-253
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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