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Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond
Won, J. (author) / Yagi, H. (author) / Hatta, A. (author) / Jiang, N. (author) / Ito, T. (author) / Sasaki, T. (author) / Hiraki, A. (author)
APPLIED SURFACE SCIENCE ; 113/114 ; 249-253
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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