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Characterization by atomic force microscopy of the SOI layer topography in low-dose SIMOX materials
Characterization by atomic force microscopy of the SOI layer topography in low-dose SIMOX materials
Characterization by atomic force microscopy of the SOI layer topography in low-dose SIMOX materials
Guilhalmenc, C. (Autor:in) / Moriceau, H. (Autor:in) / Aspar, B. (Autor:in) / Auberton-Herve, A. J. (Autor:in) / Lamure, J. M. (Autor:in) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.
01.01.1997
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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