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Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
Lu, Y. P. (Autor:in) / Lee, Y. P. (Autor:in) / Hong, M. H. (Autor:in) / Low, T. S. (Autor:in)
APPLIED SURFACE SCIENCE ; 119 ; 137-146
01.01.1997
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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