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Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Lu, Y. P. / Lee, Y. P. / Hong, M. H. / Low, T. S.

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Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Lu, Y. P. / Lee, Y. P. / Hong, M. H. / Low, T. S.

Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Lu, Y. P. / Lee, Y. P. / Hong, M. H. / Low, T. S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Contributors:

Lu, Y. P. (author) / Lee, Y. P. (author) / Hong, M. H. (author) / Low, T. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 119 ; 137-146

Publication date:

1997-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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