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TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
Konyashin, I. (Autor:in) / Fox-Rabinovich, G. (Autor:in) / Dodonov, A. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 32 ; 6029-6038
01.01.1997
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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