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TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
TiN thin films deposited by filtered arc-evaporation: structure, properties and applications
Konyashin, I. (author) / Fox-Rabinovich, G. (author) / Dodonov, A. (author)
JOURNAL OF MATERIALS SCIENCE ; 32 ; 6029-6038
1997-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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