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Vertical differential displacements at a pad/sapphire interface during polishing
Vertical differential displacements at a pad/sapphire interface during polishing
Vertical differential displacements at a pad/sapphire interface during polishing
Mess, F. (Autor:in) / Levert, J. (Autor:in) / Danyluk, S. (Autor:in)
WEAR -LAUSANNE- ; 211 ; 311-315
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11292
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