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Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Di Cioccio, L. (Autor:in) / Le Tiec, Y. (Autor:in) / Jaussaud, C. (Autor:in) / Hugonnard-Bruyere, E. (Autor:in) / Bruel, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 765-770
01.01.1998
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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