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Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Silicon Carbide on Insulator Formation by the Smart CUT[R] Process
Di Cioccio, L. (author) / Le Tiec, Y. (author) / Jaussaud, C. (author) / Hugonnard-Bruyere, E. (author) / Bruel, M. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 765-770
1998-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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