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Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Scholz, R. (Autor:in) / Goesele, U. (Autor:in) / Wischmeyer, F. (Autor:in) / Niemann, E. (Autor:in) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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