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Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
Scholz, R. (author) / Goesele, U. (author) / Wischmeyer, F. (author) / Niemann, E. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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