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Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Kanaya, M. (Autor:in) / Yashiro, H. (Autor:in) / Ohtani, N. (Autor:in) / Katsuno, M. (Autor:in) / Takahashi, J. (Autor:in) / Shinoyama, S. (Autor:in) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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