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Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Kanaya, M. (author) / Yashiro, H. (author) / Ohtani, N. (author) / Katsuno, M. (author) / Takahashi, J. (author) / Shinoyama, S. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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