Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates

MacMillan, M. F. / Loboda, M. J. / Wan, J. W. et al. | British Library Online Contents | 2007

ICP Etching of 4H-SiC Substrates

Biscarrat, J. / Michaud, J.F. / Collard, E. et al. | British Library Online Contents | 2013

Study on In Situ Etching Rate Monitoring in Numerically Controlled Local Wet Etching

Shimozono, N. / Nagano, M. / Tabata, T. et al. | British Library Online Contents | 2012

SiC In Situ Pre-Growth Etching: A Thermodynamic Study

Neyret, E. / Di Cioccio, L. / Blanquet, E. et al. | British Library Online Contents | 2000

Mechanisms in Electrochemical Etching of alpha-SiC Substrates

Mikami, H. / Hatayama, T. / Yano, H. et al. | British Library Online Contents | 2004