Study on In Situ Etching Rate Monitoring in Numerically Controlled Local Wet Etching

Shimozono, N. / Nagano, M. / Tabata, T. et al. | British Library Online Contents | 2012

AFM Study of In Situ Etching of 4H and 6H SiC Substrates

Karlsson, S. / Nordell, N. | British Library Online Contents | 1998

Studies on Selective Growth and In Situ Etching of 4H-SiC Using a TaC Mask

Li, C. H. / Bhat, I. B. / Chow, T. P. | British Library Online Contents | 2006

Practical Applications of in-situ Plasma-Etching Diagnostic Techniques

Thomas, D. J. / Southworth, P. / Flowers, M. C. et al. | British Library Online Contents | 1993

Effect of Additional Silane on In Situ H~2 Etching prior to 4H-SiC Homoepitaxial Growth

Kojima, K. / Kuroda, S. / Okumura, H. et al. | British Library Online Contents | 2007