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Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
MacMillan, M. F. (Autor:in) / Narfgren, P. O. (Autor:in) / Henry, A. (Autor:in) / Janzen, E. (Autor:in) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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