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Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
MacMillan, M. F. (author) / Narfgren, P. O. (author) / Henry, A. (author) / Janzen, E. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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