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Periodic changes in surface microroughness with progress of thermal oxidation of silicon
Periodic changes in surface microroughness with progress of thermal oxidation of silicon
Periodic changes in surface microroughness with progress of thermal oxidation of silicon
Hattori, T. (Autor:in) / Fujimura, M. (Autor:in) / Yagi, T. (Autor:in) / Ohashi, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 123/124 ; 87-90
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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