Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
Taijing, L. (Autor:in) / Ng, S. C. (Autor:in) / Furukawa, J. (Autor:in) / Furuya, H. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 878-883
01.01.1996
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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