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Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition
Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition
Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition
Heikkilaa, L. (Autor:in) / Kuusela, T. (Autor:in) / Hedman, H.-P. (Autor:in) / Ihantola, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 133 ; 84-88
01.01.1998
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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