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Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition

Heikkilaa, L. / Kuusela, T. / Hedman, H.-P. / Ihantola, H.

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Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition

Heikkilaa, L. / Kuusela, T. / Hedman, H.-P. / Ihantola, H.

Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition

Heikkilaa, L. / Kuusela, T. / Hedman, H.-P. / Ihantola, H.

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Document information

Title:

Electroluminescent SiO~2/Si superlattices prepared by low pressure chemical vapour deposition

Contributors:

Heikkilaa, L. (author) / Kuusela, T. (author) / Hedman, H.-P. (author) / Ihantola, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 133 ; 84-88

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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