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Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Hirose, F. (Autor:in) / Sakamoto, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 135 ; 254-258
01.01.1998
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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