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Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Evaluation of surface hydrogen desorption from Si-H terminated Si(100) surfaces by thermal desorption spectroscopy
Hirose, F. (author) / Sakamoto, H. (author)
APPLIED SURFACE SCIENCE ; 135 ; 254-258
1998-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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