Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Zhang, J. Y. / Hopp, B. / Geretovszky, Z. et al. | British Library Online Contents | 2000

A high rate of chemical vapor deposition of tantalum pentoxide film initiated by photoexcitation

Tanimoto, S. / Shibata, N. / Kuroiwa, K. et al. | British Library Online Contents | 1994

Tantalum Pentoxide as a Material for Biosensors: Deposition, Properties and Applications

Kulisch, W. / Gilliland, D. / Ceccone, G. et al. | British Library Conference Proceedings | 2009

Thin tantalum and tantalum oxide films grown by pulsed laser deposition

Zhang, J. Y. / Boyd, I. W. | British Library Online Contents | 2000

Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp

Zhang, J. Y. / Lim, B. / Boyd, I. W. | British Library Online Contents | 2000