Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Zhang, J. Y. / Hopp, B. / Geretovszky, Z. et al. | British Library Online Contents | 2000

Growth of tantalum pentoxide film by pulsed laser deposition

Zhang, J.-Y. / Fang, Q. / Boyd, I. W. | British Library Online Contents | 1999

Deposition of tantalum oxide films by ArF excimer laser ablation

Nishimura, Y. / Shinkawa, A. / Ujita, H. et al. | British Library Online Contents | 1998

Formation of silicon dioxide layers during UV annealing of tantalum pentoxide film

Zhang, J. Y. / Boyd, I. W. | British Library Online Contents | 2000

Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172nm excimer lamp

Zhang, J. Y. / Dusastre, V. / Boyd, I. W. | British Library Online Contents | 2001