Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors
Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors
Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors
Minotti, P. (Autor:in) / Langlet, P. (Autor:in) / Bourbon, G. (Autor:in) / Masuzawa, T. (Autor:in) / Le Moal, P. (Autor:in)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 829-836
01.01.1998
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
A mathematical model of elastic fin micromotors
British Library Online Contents | 2000
|Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
British Library Online Contents | 1993
|Preparation, heat-enabled shape variation, and cargo manipulation of polymer-based micromotors
British Library Online Contents | 2016
|