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Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

Minotti, P. / Langlet, P. / Bourbon, G. / Masuzawa, T. / Le Moal, P.

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Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

Minotti, P. / Langlet, P. / Bourbon, G. / Masuzawa, T. / Le Moal, P.

Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

Minotti, P. / Langlet, P. / Bourbon, G. / Masuzawa, T. / Le Moal, P.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

Contributors:

Minotti, P. (author) / Langlet, P. (author) / Bourbon, G. (author) / Masuzawa, T. (author) / Le Moal, P. (author)

Published in:

JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 829-836

Publication date:

1998-01-01

Size:

8 pages

ISSN:

1045-389X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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