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X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films
X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films
X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films
Yamada, Y. (Autor:in) / Kurobe, T. (Autor:in) / Yagawa, K. (Autor:in) / Ikeda, K. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 18 ; 415-418
01.01.1999
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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