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    X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films

    New search for: Yamada, Y.
    New search for: Kurobe, T.
    New search for: Yagawa, K.
    New search for: Ikeda, K.

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    X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films

    New search for: Yamada, Y.
    New search for: Kurobe, T.
    New search for: Yagawa, K.
    New search for: Ikeda, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films

    New search for: Yamada, Y.
    New search for: Kurobe, T.
    New search for: Yagawa, K.
    New search for: Ikeda, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films

    Contributors:

    Yamada, Y. (author) / Kurobe, T. (author) / Yagawa, K. (author) / Ikeda, K. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 18 ; 415-418

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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