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Investigation of relative sputtering yields during ionoluminescence of Si
Investigation of relative sputtering yields during ionoluminescence of Si
Investigation of relative sputtering yields during ionoluminescence of Si
Bhattacharyya, S.R. (Autor:in) / Brinkmann, U. (Autor:in) / Hippler, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 150 ; 107-114
01.01.1999
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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