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Investigation of relative sputtering yields during ionoluminescence of Si

Bhattacharyya, S.R. / Brinkmann, U. / Hippler, R.

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Investigation of relative sputtering yields during ionoluminescence of Si

Bhattacharyya, S.R. / Brinkmann, U. / Hippler, R.

Investigation of relative sputtering yields during ionoluminescence of Si

Bhattacharyya, S.R. / Brinkmann, U. / Hippler, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation of relative sputtering yields during ionoluminescence of Si

Contributors:

Bhattacharyya, S.R. (author) / Brinkmann, U. (author) / Hippler, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 150 ; 107-114

Publication date:

1999-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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