Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport
Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport
Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport
Nam, S.K. (Autor:in) / Shin, C.B. (Autor:in) / Economou, D.J. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 271-279
01.01.1999
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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