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Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport

Nam, S.K. / Shin, C.B. / Economou, D.J.

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Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport

Nam, S.K. / Shin, C.B. / Economou, D.J.

Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport

Nam, S.K. / Shin, C.B. / Economou, D.J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport

Contributors:

Nam, S.K. (author) / Shin, C.B. (author) / Economou, D.J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 271-279

Publication date:

1999-01-01

Size:

9 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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