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Voids in silicon substrates for novel applications
Voids in silicon substrates for novel applications
Voids in silicon substrates for novel applications
Raineri, V. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 47 - 53
01.01.2000
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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Voids in silicon by He implantation: From basic to applications
British Library Online Contents | 2000
|FORMATION OF VOIDS WITHIN COMPONENTS FORMED FROM POROUS SUBSTRATES
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|FORMATION OF VOIDS WITHIN COMPONENTS FORMED FROM POROUS SUBSTRATES
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