Simulation of Defects and Diffusion Phenomena in Silicon

Law, M. E. / Gilmer, G. H. / Jaraiz, M. | British Library Online Contents | 2000

Microscopic defects in silicon induced by zinc out-diffusion

Giese, A. / Bracht, H. / Stolwijk, N.A. et al. | British Library Online Contents | 2000

Critical issues in ion implantation of silicon below 5 keV: Defects and diffusion

Agarwal, A. / Gossmann, H.-J. / Eaglesham, D. J. et al. | British Library Online Contents | 1998

Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon

Szeles, C. / Nielsen, B. / Asoka-Kumar, P. et al. | British Library Online Contents | 1995

Intrinsic defects in silicon

Watkins, G. D. | British Library Online Contents | 2000