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Influence of reactive ion etching damage on the Schottky barrier height of Ti/p-Si interface
Influence of reactive ion etching damage on the Schottky barrier height of Ti/p-Si interface
Influence of reactive ion etching damage on the Schottky barrier height of Ti/p-Si interface
Fujimura, N. (Autor:in) / Yamaguchi, T. (Autor:in) / Kato, H. (Autor:in) / Ito, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 159-160 ; 186-190
01.01.2000
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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