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In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
Nishida, K. (Autor:in) / Morisawa, K. (Autor:in) / Hiraki, A. (Autor:in) / Muraishi, S. (Autor:in) / Katoda, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 159-160 ; 143-148
01.01.2000
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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