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In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
Nishida, K. (author) / Morisawa, K. (author) / Hiraki, A. (author) / Muraishi, S. (author) / Katoda, T. (author)
APPLIED SURFACE SCIENCE ; 159-160 ; 143-148
2000-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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