Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon
The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon
The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon
Lu, H. C. (Autor:in) / Gusev, E. (Autor:in) / Yasuda, N. (Autor:in) / Green, M. (Autor:in) / Alers, G. (Autor:in) / Garfunkel, E. (Autor:in) / Gustafsson, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 166 ; 465-468
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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