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Effect of multi-cycle annealing on the C49-C54 phase transformation in TiSi2 thin film
Effect of multi-cycle annealing on the C49-C54 phase transformation in TiSi2 thin film
Effect of multi-cycle annealing on the C49-C54 phase transformation in TiSi2 thin film
Lin, Z. (Autor:in) / Lee, Y. K. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 215-219
01.01.2000
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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