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Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties
Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties
Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties
Jungblut, H. (Autor:in) / Lewerenz, H. J. (Autor:in)
APPLIED SURFACE SCIENCE ; 168 ; 194-197
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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