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    Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties

    New search for: Jungblut, H.
    New search for: Lewerenz, H. J.

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    Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties

    New search for: Jungblut, H.
    New search for: Lewerenz, H. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties

    New search for: Jungblut, H.
    New search for: Lewerenz, H. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Photo-induced ultrathin electropolishing layers on silicon: formation, composition and structural properties

    Contributors:

    Jungblut, H. (author) / Lewerenz, H. J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 168 ; 194-197

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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