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Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Vidal, S. (Autor:in) / Maury, F. (Autor:in) / Gleizes, A. (Autor:in) / Mijoule, C. (Autor:in)
APPLIED SURFACE SCIENCE ; 168 ; 57-60
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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