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Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Photo-assisted MOCVD of copper using Cu(hfa)(COD) as precursor
Vidal, S. (author) / Maury, F. (author) / Gleizes, A. (author) / Mijoule, C. (author)
APPLIED SURFACE SCIENCE ; 168 ; 57-60
2000-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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