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Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates
Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates
Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates
Korolkov, O. (Autor:in) / Rang, T. (Autor:in)
MATERIALS SCIENCE FORUM ; 353/356 ; 603-606
01.01.2001
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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