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    Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates

    New search for: Korolkov, O.
    New search for: Rang, T.

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    Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates

    New search for: Korolkov, O.
    New search for: Rang, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates

    New search for: Korolkov, O.
    New search for: Rang, T.

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates

    Contributors:

    Korolkov, O. (author) / Rang, T. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 353/356 ; 603-606

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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