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Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Lourenco, M. A. (Autor:in) / Gardiner, D. J. (Autor:in) / Bowden, M. (Autor:in) / Hedley, J. (Autor:in) / Wood, D. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 19 ; 767-770
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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