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Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
Lourenco, M. A. (author) / Gardiner, D. J. (author) / Bowden, M. (author) / Hedley, J. (author) / Wood, D. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 19 ; 767-770
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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